Metal treatment – Compositions – Heat treating
Patent
1984-10-09
1987-01-06
Ozaki, George T.
Metal treatment
Compositions
Heat treating
148187, 148189, 148191, H01L 21223, H01L 21383
Patent
active
046344748
ABSTRACT:
Proposed is a method of fabricating III-V and II-VI compound semiconductors and a resulting product where there is formed on the surface a coating which can function as a diffusion mask and/or a passivation layer. The coating is a silicon layer deposited by a method which does not damage the semiconductor surface.
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Camlibel Irfan
Chin Aland K.
Singh Shobha
Van Uitert LeGrand G.
Zydzik George J.
AT&T Bell Laboratories
Birnbaum Lester H.
Ozaki George T.
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