Coating method

Details Coating method Coating method

1983-12-19

1985-07-02

Pianalto, Bernard D.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192N, C23C 1500

Patent

active

045266735

ABSTRACT:
A coating apparatus and method for coating industrial cutting and turning tools of any desired shape and configuration and the like significantly to improve the tools' working properties. The coating is formed of cubic boron nitride, with a preferred thickness not exceeding ten microns.
The coating apparatus includes an rf excited plasma source chamber having a gas feed ring for ionizing a gas admitted into the chamber via the ring. The preferred feedgas is a borazine and benzene vapor mixture. A coating chamber is mounted adjacent to and contiguous with the plasma source chamber via a neck portion. The coating chamber includes a vacuum interlock to permit the entry and removal of a tool transport. At least one vacuum pump is operatively connected to the chamber. Preferably, a plurality of permanent magnets and electron supply filaments are arranged circumferentially about the plasma source chamber. Preferably, the tool transport is rotatable during coating. Preferably, the apparatus is microprocessor controlled.

REFERENCES:
T. Takagi et al., "Ion Beam Technique and Applications" Thin Solid Films 63 (1979), pp. 41 et seq.
S. Aisenberg et al., "Ion-Beam Deposition of Thin Films of Diamonlike Carbon" Journal of Applied Physics vol. 42, No. 7 (Jun. 1971), pp. 2953-2958.
C. Weissmantel et al., "Structure & Properties of Quasi-Amorphous Films . . . " Thin Solid Films, 72 (1980) pp. 19-31.
C. Weissmantel, "Ion Beam Deposition of Special Film Structures" J. Vac, Sci. Technol., 18 (2), Mar. 1981, pp. 179-185.
G. Carter et al., "The Interaction of Low Energy Ion Beams With Surfaces," Thin Solid Films, 80 (1981) pp. 13-29.
M. Wakatsuki et al., "Synthesis of Polycrystalline Cubic BN" Mat. Res. Bul. vol. 7, Jul. 10, 1972 pp. 999-1004.
G. Gautherin et al., "Some Trends in Preparing Film Structure . . . " Thin Solid Films, 50 (1978), pp. 135 et seq.
C. Weissmantel et al., "Preparation of Hard Coatings by Ion Beam Methods," Thin Solid Films, 63 (1979) pp. 315-325.

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