Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate
2011-08-16
2011-08-16
Mayes, Melvin (Department: 1732)
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Composite having voids in a component
Reexamination Certificate
active
07998567
ABSTRACT:
Disclosed is a coating liquid for forming a protective film having high film strength and a low specific dielectric constant for semiconductor processing, and a method for preparing the coating liquid. The coating liquid is a liquid composition comprising (a) silicon compound obtained by hydrolyzing tetraalkyl orthosilicate (TAOS) and alkoxysilane (AS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) and water, or a silicon compound obtained by hydrolyzing or partially hydrolyzing tetraalkyl orthosilicate (TAOS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) and water, mixing the hydrolyzed or partially hydrolyzed product with alkoxysilane (AS) or a hydrolyzed or partially hydrolyzed product thereof, and hydrolyzing all or a portion of the mixture, (b) an organic solvent, and (c) water. The coating liquid is characterized in that a quantity of water contained in the liquid composition is in the range from 35 to 65% by weight.
REFERENCES:
patent: 6261357 (2001-07-01), Egami et al.
patent: 6406794 (2002-06-01), Shiota et al.
patent: 2003/0109633 (2003-06-01), Kobayashi et al.
patent: 2004/0110379 (2004-06-01), Yoshioka et al.
patent: 2004/0110896 (2004-06-01), Yoshioka et al.
patent: 2006/0009575 (2006-01-01), Nakashima
patent: 2006/0084277 (2006-04-01), Nakashima et al.
patent: 2003-41191 (2003-02-01), None
patent: 2003-171616 (2003-02-01), None
patent: 2003041191 (2003-02-01), None
patent: 2004-277463 (2004-10-01), None
patent: 2005-327757 (2005-11-01), None
Arao Hiroki
Egami Miki
Komatsu Michio
Nakashima Akira
Cohen Stefanie
JGC Catalysts and Chemicals Ltd.
Leydig , Voit & Mayer, Ltd.
Mayes Melvin
LandOfFree
Coating liquid for formation of protective film for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coating liquid for formation of protective film for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating liquid for formation of protective film for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2708667