Coating insulating materials by glow discharge

Details Coating insulating materials by glow discharge Coating insulating materials by glow discharge

1981-08-14

1983-08-23

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 38, 204164, C23C 1100

Patent

active

044004109

ABSTRACT:
Coatings of hard carbon, silicon, or germanium are applied to electrically insulating materials in a D.C. glow discharge chamber. Initiation and maintenance of a glow discharge is ensured by using a cathode of larger area than the material to be coated. For example the cathode may be twice the diameter of the material to be coated. Materials capable of being coated include zinc sulphide, zinc selenide, silica, and glass. The gases used are hydrocarbon e.g. butane, methane, etc. for carbon coatings; silane for silicon coatings; and germane for germanium coatings.

REFERENCES:
patent: 3473959 (1969-10-01), Ehinger et al.
patent: 4060660 (1977-11-01), Carlson et al.
patent: 4140814 (1979-02-01), Hynecek
patent: 4142004 (1979-02-01), Hauser et al.
patent: 4173661 (1979-11-01), Bourdon

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