Coating for optical MEMS devices

Details Coating for optical MEMS devices Coating for optical MEMS devices

2006-03-07

2006-03-07

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S223100, C359S224200, C359S584000, C359S900000

Reexamination Certificate

active

07009745

ABSTRACT:
A micromechanical device having a deflectable member which contacts a stationary member. An antireflective coating is applied to portions of the micromechanical device to limit undesired reflection from the device. A passivation or lubrication layer is applied to the device to reduce stiction between the deflectable member and the stationary member. An insulator layer is utilized between the antireflective coating and the lubrication layer to prevent photoelectric-induced breakdown of the lubrication layer.

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 6147790 (2000-11-01), Meier et al.
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6549694 (2003-04-01), Makino et al.

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