Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2006-03-07
2006-03-07
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S223100, C359S224200, C359S584000, C359S900000
Reexamination Certificate
active
07009745
ABSTRACT:
A micromechanical device having a deflectable member which contacts a stationary member. An antireflective coating is applied to portions of the micromechanical device to limit undesired reflection from the device. A passivation or lubrication layer is applied to the device to reduce stiction between the deflectable member and the stationary member. An insulator layer is utilized between the antireflective coating and the lubrication layer to prevent photoelectric-induced breakdown of the lubrication layer.
REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 6147790 (2000-11-01), Meier et al.
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6549694 (2003-04-01), Makino et al.
Jacobs Simon Joshua
Miller Seth A.
Brady III Wade James
Brill Charles A.
Phan James
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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