Coating film processing method and apparatus

Details Coating film processing method and apparatus Coating film processing method and apparatus

2007-12-04

2011-12-06

Tadesse, Yewebdar (Department: 1717)

Coating apparatus

Program, cyclic, or time control

Having prerecorded program medium

C118S052000, C118S612000, C118S313000, C118S600000, C118S696000, C396S611000

Reexamination Certificate

active

08069816

ABSTRACT:
A coating film processing method is used for processing a coating film formed on a surface of a substrate to prepare for an immersion light exposure process arranged to perform light exposure through a liquid. The method includes supplying a solvent-containing liquid comprising a combination of a solvent and a solvent-ability decreasing agent for decreasing solvent ability, or a diluted solvent, onto an edge portion of the coating film, thereby performing edge portion cutting; and supplying a cleaning liquid onto the edge portion of the coating film, thereby performing edge portion cleaning, subsequently to the edge portion cutting.

REFERENCES:
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patent: 2008/0057194 (2008-03-01), Tanaka
patent: 2008/0088809 (2008-04-01), Kosugi et al.
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patent: 2006-80404 (2006-03-01), None
patent: 2006-235230 (2006-09-01), None
Office Action issued Mar. 22, 2011, in Japan Patent Application No. 2006-340186 (with English translation).
Office Action issued Aug. 23, 2011 in Japanese Patent Application No. 2006-340186 filed Dec. 18, 2006 (with partial English translation)—7 pages.

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