Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2006-04-14
2009-10-13
Culbert, Roberts (Department: 1792)
Coating processes
With post-treatment of coating or coating material
Heating or drying
Reexamination Certificate
active
07601396
ABSTRACT:
The object of the present invention is to provide a method for forming a coating film in which a coating film is prevented from drastically shrinking by controlling the temperature accurately when a SOG film is formed in a substrate with a coating liquid containing an alkoxysilane compound, cracks are prevented from occurring in the SOG film by preventing the glass forming material from disappearing, and also metal materials of the circuit are prevented from melting and deforming. According to the present invention, the temperature of the surface of the material to be treated is escalated from a lower temperature to a higher temperature by setting at least three ranges of the temperature in the drying process, and the temperature of the surface of the material to be treated is further increased to 250-500° C. and maintained within the range of ±3° C. during the baking process.
REFERENCES:
patent: 6489252 (2002-12-01), Goo et al.
patent: 10-310872 (1998-11-01), None
patent: 10-313002 (1998-11-01), None
Blackman William D.
Carrier Joseph P.
Carrier Blackman & Associates P.C.
Culbert Roberts
Tokyo Ohka Kogyo Co. Ltd.
LandOfFree
Coating film forming method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coating film forming method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating film forming method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4066887