Coating apparatus – With vacuum or fluid pressure chamber
Reexamination Certificate
2005-08-23
2005-08-23
Fiorilla, Chris (Department: 1734)
Coating apparatus
With vacuum or fluid pressure chamber
C118S610000, C118S321000, C118S323000
Reexamination Certificate
active
06932868
ABSTRACT:
A substrate is horizontally held by a substrate holding portion freely movable in the Y-direction, and a nozzle portion is provided above and opposing the substrate, and movable in X-direction corresponding to the coating liquid feeding region of the substrate. A discharge opening is formed at a lower end of the nozzle portion, and a channel connecting the discharge opening with a coating liquid feed tube coupled to an upper end of the nozzle portion is formed within the discharge opening. At the mid-stream of the channel, a liquid pool portion larger in diameter than the discharge opening is formed, the inside of which is provided with a filtering member formed by porous bodies blocking the channel. The filtering member forms a pressure loss portion, which absorbs pulsation occurring at the coating liquid feed tube before it reaches the discharge opening.
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Kawafuchi Yoshiyuki
Kitano Takahiro
Koga Norihisa
Takei Toshichika
Fiorilla Chris
Koch George
Tokyo Electron Limited
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