Coating processes – With post-treatment of coating or coating material – Solid treating member or material contacts coating
Reexamination Certificate
2005-11-01
2005-11-01
Bareford, Katherine (Department: 1762)
Coating processes
With post-treatment of coating or coating material
Solid treating member or material contacts coating
C427S356000, C427S378000, C427S384000, C427S407100, C427S434300, C427S444000, C034S302000, C034S305000, C034S307000, C034S309000, C034S311000, C034S465000, C034S487000
Reexamination Certificate
active
06960372
ABSTRACT:
The present invention uniformly dries, in a clean room in which down flow is constituted, a coated film formed on a surface of a substrate held in a state that the coated surface faces down. In a coating apparatus including an absorption board holding a substrate in a state that its surface to be coated looks down, and a coating mechanism that coats with coating liquid the surface to be coated of the substrate held by this absorption board, there is provided an air current generating apparatus which supplies clean gas toward the surface to be coated.
REFERENCES:
patent: 6482558 (2002-11-01), Singh et al.
patent: 2001-62370 (2001-03-01), None
patent: 2001-321711 (2001-11-01), None
Bareford Katherine
Hoya Corporation
Sughrue & Mion, PLLC
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