Coating electronic substrates with silica derived from silazane

Details Coating electronic substrates with silica derived from silazane Coating electronic substrates with silica derived from silazane

1994-03-10

1994-10-25

Lusignan, Michael

Coating processes

Heat decomposition of applied coating or base material

427228, 427387, 437231, 437238, 528 38, B05D 302

Patent

active

053587391

ABSTRACT:
A silica coating is formed on an electronic substrate by applying a silazane polymer on the substrate and converting it to silica by heating in an oxidizing environment. The resultant thick planarizing coatings are useful as protective coatings and dielectric inner layers.

REFERENCES:
patent: 4719125 (1988-01-01), Anello et al.
patent: 4746480 (1988-05-01), Clark
patent: 4749631 (1988-06-01), Haluska et al.
patent: 4756977 (1988-07-01), Haluska et al.
patent: 4826733 (1989-05-01), Haluska et al.
patent: 5086126 (1992-02-01), Mahone
patent: 5152819 (1992-10-01), Blackwell et al.
patent: 5176941 (1993-01-01), Peuckert et al.
"Accuglass Siloxane Spin-On Glasses", Planarization and Diffusion Products, Allied, pp. 1-7, May, 1987.

Affiliated with

Also associated with

Rating

Coating electronic substrates with silica derived from silazane does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Coating electronic substrates with silica derived from silazane , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating electronic substrates with silica derived from silazane will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-133829