Coating device and method

Details Coating device and method Coating device and method

2005-01-25

2005-01-25

Chen, Bret (Department: 1762)

Coating processes

Nonuniform coating

Mask or stencil utilized

C427S255500, C204S192100

Reexamination Certificate

active

06846517

ABSTRACT:
A method for coating a film with more than two thicknesses in different sections of the film. A substrate is set on a turntable that spins regularly. A mask is set close to the substrate and a film is coated on the substrate by a coating source. The shape of the mask depends on the thickness of the film. The coating source is set opposite the turntable and the mask is set between the coating source and the turntable.

REFERENCES:
patent: 4434434 (1984-02-01), Bhattacharya et al.
patent: 4548698 (1985-10-01), Sellschopp
patent: 6168832 (2001-01-01), Boucher
patent: 6250758 (2001-06-01), Yoshihara et al.

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