Coating device

Details Coating device Coating device

1989-04-04

1990-02-13

Hoag, Willard

Coating apparatus

With vacuum or fluid pressure chamber

118 52, 118 54, B05C 102

Patent

active

048996866

ABSTRACT:
A coating device includes a ring-shaped outer circumferential groove formed along and adjacent to the outer circumferential rim of a cup means and communicated with a processing vessel, and a processing liquid supply source connected to the outer circumferential groove through nozzles. A partition wall is erected, as an inner wall of the cup means, inside the outer circumferential groove with the nozzles and a groove interposed between them. The supply of the processing liquid can be thus made stable and processing failure because of air bubbles mixed in the liquid and irregular coating of the liquid on substrates can be prevented.

REFERENCES:
patent: 3791342 (1974-02-01), Boyer et al.
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 4838979 (1989-06-01), Nishida et al.

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