Coating/developing apparatus and operation method thereof

Details Coating/developing apparatus and operation method thereof Coating/developing apparatus and operation method thereof

2008-07-02

2009-08-18

Mathews, Alan A (Department: 2851)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C355S027000, C700S112000, C700S121000

Reexamination Certificate

active

07575382

ABSTRACT:
A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second transfer device, and first to forth stages. A controller executes a first operation mode preset to transfer substrates from the process block and carrier block into the examination block in parallel. The first operation mode includes transferring substrates processed by the process block to the third or fourth stage through or not through an examination module by the second transfer device, transferring substrates to be only examined from a carrier in the carrier block to the second stage by the first transfer device, and transferring these substrates from the second stage to an examination modules by the second transfer device, and transferring substrates thus examined from the examination block to the third or fourth stage by the second transfer device.

REFERENCES:
patent: 2002/0037462 (2002-03-01), Ogata et al.
patent: 2007/0056514 (2007-03-01), Akimoto et al.
patent: 2007/0088450 (2007-04-01), Shinozuka et al.
patent: 2005-175052 (2005-06-01), None

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