Coating/developing apparatus and method

Details Coating/developing apparatus and method Coating/developing apparatus and method

2011-03-15

2011-03-15

Perkey, W. B. (Department: 2862)

Photography

Fluid-treating apparatus

Having testing, calibration, or indicating

C396S611000

Reexamination Certificate

active

07905668

ABSTRACT:
A coating/developing apparatus includes a first storage section that stores data comprising correlations of different pattern information units including at least a line width of the resist pattern, different values of a film thickness of the underlying film, and different light information profiles. The apparatus further includes a mechanism configured to use a film thickness distribution to obtain an estimated film thickness of the underlying film at a light-irradiation area on the surface of the substrate, and to check the estimated film thickness and a light information profile obtained at the light-irradiation area against the data to determine pattern information at the light-irradiation area.

REFERENCES:
patent: 7780366 (2010-08-01), Ogata et al.
patent: 2002-260994 (2002-09-01), None

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