Coating compositions for use with an overcoated photoresist

Details Coating compositions for use with an overcoated photoresist Coating compositions for use with an overcoated photoresist

2007-01-16

2007-01-16

Chen, Vivian (Department: 1773)

Stock material or miscellaneous articles

Composite

Of polyester

C430S271100, C430S325000, C430S523000, C430S531000, C430S533000, C524S284000, C524S315000

Reexamination Certificate

active

10844125

ABSTRACT:
In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.

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