Coating apparatus therefor

Details Coating apparatus therefor Coating apparatus therefor

1995-09-07

1998-06-09

Czaja, Donald E.

Coating apparatus

With means to centrifuge work

118319, 118320, 134902, 134200, 134153, B05C 1102, B08B 300

Patent

active

057627088

ABSTRACT:
A coating apparatus comprises a rotary container rotatable about a rotational axis as the center, a rotary rest table, located in the rotary container to be movable vertically and rotatable about the rotational axis as the center, for supporting a target substrate thereon, coating solution supply pipe for applying a coating solution to the target substrate, cleaning solution supply pipe for spraying a cleaning solution to an inner surface of the rotary container, a seal member provided between the rotary rest table and the bottom wall of the rotary container and capable of sealing a gap between the rotary rest table and the bottom wall of the rotary container, and connecting mechanism for connecting the rotary container and the rotary rest table so as to rotate together. The cleaning solution supply pipe projects from a through hole formed in the upper portion of the rotary container to be coaxial with the rotational axis, and the coating solution supply pipe projects from the through hole of the rotary container to be coaxial with the rotational axis.

REFERENCES:
patent: 4075974 (1978-02-01), Plows et al.
patent: 4941426 (1990-07-01), Sago et al.
patent: 5211753 (1993-05-01), Swain
patent: 5261566 (1993-11-01), Nakayama
patent: 5439519 (1995-08-01), Sago et al.

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