Coating apparatus and method of controlling the same

Details Coating apparatus and method of controlling the same Coating apparatus and method of controlling the same

1997-10-09

1999-06-01

Beck, Shrive

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427240, 427345, 427425, 118663, 118684, 118 52, 118 56, 118603, 118610, 118319, 118320, 118326, 118500, B05D 312, B05C 500

Patent

active

059086572

ABSTRACT:
In the present invention, a waste solution and a exhaust gas are guided together from a drain cup DC into a storing means through common discharge means. Naturally, the gas-liquid separation is performed within the storing means in place of performing the gas-liquid separation within the drain cup DC. Therefore, the waste solution is not solidified within the drain cup so as to plug the common discharge means. Also, a predetermined waste solution is kept stored in the storing means included in the coating apparatus of the present invention, making it possible to permit the surface of the stored waste solution to absorb the mist, and the waste solution is prevented from being solidified within the storing means. Further, since a minimum amount of the exhaust gas is kept discharged even during non-operation of the coating apparatus by using an exhaust gas damper whose degree of opening can be controlled, the waste solution stored in the storing means is prevented from being solidified. Also, the waste solution evaporated within the storing means can be released to the outside.

REFERENCES:
patent: 4967782 (1990-11-01), Yamashita et al.
patent: 5358740 (1994-10-01), Bornside et al.
patent: 5565034 (1996-10-01), Nanbu et al.

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