Coating apparatus – With means to centrifuge work
Patent
1998-01-28
1999-10-19
Simmons, David A.
Coating apparatus
With means to centrifuge work
118612, 118320, 3661602, 3661521, 239427, 137896, B05B 1304, B05B 706, G05D 1100, A01G 2500
Patent
active
059682680
ABSTRACT:
Disclosed is a coating apparatus, comprising: a first stream-combining valve communicating with each of a first solvent tank and a resist solution tank, a first pump for supplying an initial resist solution from the resist solution tank toward said first stream-combining valve, a second pump for supplying a solvent from said first solvent supply toward said first stream-combining valve, a first mixer for mixing under stirring the initial resist solution flowing out of said first stream-combining valve with a solvent, a second stream-combining valve arranged downstream of said first mixer and communicating with each of the first mixer and said second solvent supply, a third pump for supplying the solvent from said second solvent supply toward the second stream-combining valve, a second mixer for mixing under stirring said primary mixed liquid material coming out of said second stream-combining valve with a solvent so as to prepare a final mixed liquid material, a nozzle equipped with a liquid spurting port for spurting said final mixed liquid material prepared in said second mixer toward the substrate, and a controller for controlling each of the first, second, third pumps and the first and second stream-combining valves so as to control the mixing ratio of the initial resist solution to the solvent and to control the mixing ratio of the primary mixed liquid material to the solvent.
REFERENCES:
patent: 5464283 (1995-11-01), Davis
patent: 5652919 (1997-07-01), Itoh
patent: 5658615 (1997-08-01), Hasebe et al.
Ito Shin'ichi
Kitano Takahiro
Okumura Katsuya
Kabushiki Kaisha Toshiba
Padgett Calvin
Simmons David A.
Tokyo Electron Limited
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