Coating processes – Centrifugal force utilized
Patent
1998-03-02
2000-05-02
Edwards, Laura
Coating processes
Centrifugal force utilized
427425, 118683, 118684, 118610, 118 52, 118 56, 118319, 118320, B05C 500
Patent
active
060569980
ABSTRACT:
A coating apparatus of the present invention comprises coating solution supply sources for supplying a coating solution, a mounting table for holding a substrate to allow a surface to be coated to face upward, nozzles for pouring the coating solution toward the surface of the substrate to be coated, mounted on the mounting table, a pump chamber capable of swinging its volume and having a sucking port for introducing the coating solution from the coating solution supply source and a spurting port for spurting the coating solution and to be supplied toward the nozzle, pump driving mechanisms for increasing and decreasing an inner pressure of the pump chamber to introduce and spurt the coating solution into/from the pump chamber, a filter provided inside or at the upstream side of the pump chamber for filtrating the coating solution before the coating solution is spurted out from the pump chamber through the spurting outlet, a valve provided between the pump chamber and the nozzle for regulating a flow amount of the coating solution to be sent from the pump chamber to the nozzle, and a controller for controlling the operation of the pump driving mechanism in such a manner that a sucking speed of the coating solution into the pump chamber is smaller than a spurting speed of the coating solution from the pump chamber.
REFERENCES:
patent: 5658615 (1997-08-01), Hasebe et al.
patent: 5664254 (1997-09-01), Ohkura et al.
patent: 5766359 (1998-06-01), Sichmann et al.
patent: 5858466 (1999-01-01), Liu et al.
Edwards Laura
Tokyo Electron Limited
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