Coating apparatus

Details Coating apparatus Coating apparatus

1996-10-09

1998-06-30

Chin, Peter

Coating apparatus

Projection or spray type

Rotating turret work support

118302, 118320, 118 52, 118 54, 239549, 239550, 239551, 239556, B05B 1302, B05B 716, B05B 1502, B05B 1304

Patent

active

057727643

ABSTRACT:
A coating apparatus comprises a spin chuck for holding and rotating a substrate, a header unit movable along a linear line connecting a position just above a center-of-rotation of the substrate, to a home position of the unit, a plurality of nozzles included in the header unit for discharging coating liquids to the substrate held on the spin chuck, the first nozzles having their respective nozzle ports arranged in line along the linear line, and a plurality of coating liquid supply means for supplying the coating liquids to the first nozzles, respectively.

REFERENCES:
patent: 4564280 (1986-01-01), Fukuda
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5089305 (1992-02-01), Ushijima et al.
patent: 5374312 (1994-12-01), Hasebe et al.
patent: 5449405 (1995-09-01), Cardinali et al.

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