Coating apparatus

Details Coating apparatus Coating apparatus

1997-12-22

2000-05-09

Edwards, Laura

Coating apparatus

With means to centrifuge work

118612, 118319, 118320, 3661602, 3661521, 239304, 239310, 239410, 239413, 137 88, 137606, 137897, 137898, B05C 500

Patent

active

060598808

ABSTRACT:
A coating apparatus according to the invention comprises a spin chuck for holding a substrate, resist solution tanks which contain a primary resist solution, a thinner tank which contains thinner, a confluence valve communicating with the thinner tank and the resist solution tanks, first pumps each for supplying the confluence valve with the primary resist solution from a corresponding one of the resist solution tanks, a second pump for supplying thinner from the thinner tank to the confluence valve, a mixer for mixing the primary treatment solution and thinner supplied from the confluence valve, a nozzle for applying a solution from the mixer, to the substrate held by the spin chuck, and a controller for controlling the first and second pumps to adjust the mixture ratio of the primary resist solution to be supplied from each of the resist solution tanks to the confluence valve, to thinner to be supplied from the thinner tank to the confluence valve.

REFERENCES:
patent: 3806037 (1974-04-01), Loewenkamp
patent: 5254367 (1993-10-01), Matsumura et al.
patent: 5464283 (1995-11-01), Davis
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5652919 (1997-07-01), Itoh
patent: 5658615 (1997-08-01), Hasebe et al.

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