Coating apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber

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118730, C23C 1308

Patent

active

042768551

ABSTRACT:
A coating apparatus having a housing and a vacuum pump for establishing a vacuum in the housing. First and second rotors are disposed within the housing for rotation about axes which are offset from the horizontal by less than 45.degree. whereby the upper portions of the rotors are in relatively close proximity to each other and the lower portions of the rotors are spaced apart from each other. A source of coating material is disposed between the rotors generally in line with the axis of rotation of the rotors. The rotors have substrate carrying surfaces having longitudinal dimensions extending generally parallel to the axis of rotation which is such so that an imaginary vertical line extending downwardly from the top portion of the substrate carrying surface from the inner extremity of the same clears the outermost margin of the lower portion of the substrate carrying surfaces of the rotor whereby debris and the like falling by force of gravity from the top portion of the rotor will clear the lower portion of the rotor.

REFERENCES:
patent: 3643625 (1972-02-01), Mahl
patent: 3858547 (1975-01-01), Bergfelt
"Contamination Free Sputtering," Buchmann et al., IBM Technical Disclosure Bulletin, vol. 15, No. 6, Nov. 1972, pp. 1818-1819.

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