Coating apparatus – With means to centrifuge work
Patent
1992-09-18
1994-05-17
Simmons, David A.
Coating apparatus
With means to centrifuge work
118 55, 118 70, 118302, B05C 100
Patent
active
053124871
ABSTRACT:
A coating apparatus includes a rotating and holding mechanism which holds and rotates an object to be coated, a container which encloses the rotating and holding mechanism and prevents the dispersion of coating liquid supplied to the object, a washing fitting provided to the rotating and holding mechanism and which supplies washing liquid for washing off coating liquid which has attached to the inside of container. This washing fitting has a collection pool for collecting the washing liquid, and discharge holes through which the washing liquid in the collection pool is discharged by rotation of the rotating and holding mechanism. Thus, it is possible to evenly wash off coating liquid which has attached to the inside of the container in a short time with a small amount of washing liquid.
REFERENCES:
patent: 2369592 (1945-02-01), Marinsky
Akimoto Masami
Fujimoto Akihiro
Iwatsu Haruo
Rivard Paul M.
Simmons David A.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Kyushu Kabushiki Kaisha
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