Coating and processing apparatus and method

Details Coating and processing apparatus and method Coating and processing apparatus and method

2004-03-09

2009-11-10

Tadesse, Yewebdar T (Department: 1792)

Coating apparatus

With means to centrifuge work

C118S612000, C118S320000, C118S326000

Reexamination Certificate

active

07615117

ABSTRACT:
There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.

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