Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1987-10-16
1989-04-11
Willis, Davis L.
Optics: measuring and testing
By polarized light examination
With birefringent element
G01B 1100
Patent
active
048200492
ABSTRACT:
An improved system for testing a full reflectivity range of optical surfaces employs an improved Fizeau spherical or plano wavefront interferometer comprising a laser source (2) and an optical element (18) located in the wavefront (16) having a reference surface (20) everywhere normal to the wavefront (16) which has a partially reflective, partially absorbtive, and partially transmissive beamsplitting coating (19) applied to the plano or spherical reference surface (20) and having a transmittance such that there will be only two beam interference and the contrast of the two beam interference fringes between the reflected reference wavefront (25R) and the reflected test wavefront (25T) will be substantially equalized at the two extremes of the test surface (28) reflectivity.
REFERENCES:
patent: 3998553 (1976-12-01), Hunter et al.
patent: 4201473 (1980-05-01), Domenicati et al.
patent: 4696572 (1987-09-01), Ono
Koren Matthew W.
Willis Davis L.
Zygo Corporation
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