Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate
2011-08-16
2011-08-16
Laballe, Clayton E (Department: 2862)
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
Reexamination Certificate
active
07997813
ABSTRACT:
A coating and developing system includes processing blocks of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing blocks are arranged longitudinally between a carrier block and an interface block. The number of processing blocks like the processing blocks arranged between the carrier block and the interface block is adjusted to adjust the throughput of the coating and developing system. Thus, a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.
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Hashimoto Takahiro
Hayashi Shin'ichi
Hayashida Yasushi
Matsuoka Nobuaki
Tsuchiya Katsuhiro
Adams Bret
LaBalle Clayton E
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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