Coating and developing system, coating and developing method...

Details Coating and developing system, coating and developing method... Coating and developing system, coating and developing method...

2011-01-18

2011-01-18

Mathews, Alan A (Department: 2882)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C355S027000, C118S052000, C430S327000

Reexamination Certificate

active

07871211

ABSTRACT:
A coating and developing system has a first processing block, a second processing block, and a transfer block interposed between the first and the second processing block. A first direct carrying means carries substrates from a carrier block to the transfer block. The transfer block distributes the substrates to respective film forming unit blocks of the first and the second processing block. Substrates on which films have been formed by the first and the second processing block are collected temporarily in the transfer block. A second direct carrying means carries the substrate collected in the transfer block from the transfer block to an interface block. Use of the first and the second processing block can improve the throughput of the coating and developing system. Since a carrying route from the carrier block to the first processing block, and a carrying route from the carrier block to the second processing block are the same, a carrying program is easy to create.

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