Coating and developing system and coating and developing method

Details Coating and developing system and coating and developing method Coating and developing system and coating and developing method

2007-10-23

2007-10-23

Mathews, Alan (Department: 2851)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C355S027000, C355S030000, C134S902000

Reexamination Certificate

active

11346430

ABSTRACT:
A coating and developing system is capable of preventing the contamination of a substrate with particles while the same coats a surface of a substrate with a resist film and develops the resist film after the substrate has been processed by immersion exposure. The coating and developing system includes: a processing block including coating units for forming a resist film on a surface of a substrate and developing units for processing the resist film formed on the substrate with a developer, and an interface block connected to the processing block and an exposure system for carrying out an immersion exposure process. The interface block includes: substrate cleaning units for cleaning the substrate processed by the immersion exposure process, a first carrying mechanism and a second carrying mechanism. The first carrying mechanism carries a substrate processed by immersion exposure to the substrate cleaning unit. The second carrying mechanism carries the substrate cleaned by the substrate cleaning unit. Thus the contamination of the substrate with external particles can be prevented and hence the spread of contamination with particles over the processing units of the processing block and substrates processed by the processing units can be prevented.

REFERENCES:
patent: 6147329 (2000-11-01), Okamura et al.
patent: 6814809 (2004-11-01), Matsushita et al.
patent: 2004-193597 (2004-07-01), None

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