Coating and developing system

Details Coating and developing system Coating and developing system

2005-06-21

2008-07-22

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

With developing

C396S611000

Reexamination Certificate

active

07403260

ABSTRACT:
The coating and developing system carries a substrate delivered to a carrier handling block to a processing block to form a film on the substrate by a coating block included in the processing block, carries the substrate through an interface block to the exposure system, processes the substrate having the exposed film by a developing process by a developing block included in the processing block and returns the thus processed substrate to the carrier handling block. A direct carrying means is superposed on the coating block and the developing block to carry a substrate having a surface coated with a film from the carrier handling block directly to the interface block. A test substrate can be carried to the exposure system to inspect the condition of the exposure system even in a state where the coating block and the developing block are under maintenance work.

REFERENCES:
patent: 6515731 (2003-02-01), Akimoto
patent: 7267497 (2007-09-01), Akimoto et al.
patent: 3337677 (2002-08-01), None
patent: 2004-193597 (2004-07-01), None

Affiliated with

Also associated with

Rating

Coating and developing system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Coating and developing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating and developing system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3970970