Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2007-01-16
2010-06-22
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
With developing
C355S030000, C396S611000, C430S311000
Reexamination Certificate
active
07742146
ABSTRACT:
A resist film formed on a substrate is coated with a water-repellent protective film and the substrate is subjected to a developing process after the substrate has been processed by an immersion exposure process. The protective film is removed from the substrate after the resist film has been processed by the immersion exposure process, the substrate is processed by a heating process, and then the substrate is subjected to a developing process. The surface of the substrate is cleaned with a cleaning liquid before the protective film is removed and after the substrate has been processed by the immersion exposure process or the surface of the substrate is cleaned with a cleaning liquid after removing the protective film and before the substrate is subjected to the heating process.
REFERENCES:
patent: 7267497 (2007-09-01), Akimoto et al.
patent: 2005-175079 (2005-06-01), None
patent: 2005-183709 (2005-07-01), None
English Translation of JP 2005-175079 (dated Jun. 30, 2005).
English Translation of JP 2005-183709 (dated Jul. 7, 2005).
Kyouda Hideharu
Yamamoto Taro
Yoshihara Kousuke
Mathews Alan A
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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