Coating and developing apparatus, substrate processing...

Details Coating and developing apparatus, substrate processing... Coating and developing apparatus, substrate processing...

2008-07-24

2009-10-06

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

With developing

C396S611000, C700S100000

Reexamination Certificate

active

07599042

ABSTRACT:
With regard to a group of substrates preceding a substrate of which residence time is under calculation, a time t1and a time t2are calculated, t1being a time interval from a time point in which a substrate B1under the consideration has become ready from being transferred out from a wait module to a time point in which a heating module used for the substrate B1has been ready for processing the substrate B1, t2being a time interface from a time on in which the substrate B1under calculation has been transferred out from the wait module to a time point of reaching the heating module used for the substrate B1, and a waiting time t of the substrate B1in the wait module is calculated according to t=t1−t2.

REFERENCES:
patent: 2007/0016320 (2007-01-01), Higashi et al.

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