Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate
2011-06-07
2011-06-07
Laballe, Clayton E (Department: 2862)
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
Reexamination Certificate
active
07955011
ABSTRACT:
A coating and developing apparatus is provided which requires a smaller occupation space even when it incorporates a substrate inspection unit, while eliminating a disadvantageous layout. A coating film forming part B3including a plurality of process units and transfer mechanisms A3and A4, and a developing part B1including a plurality of process units31and a transfer mechanism A1are vertically arranged in a process block S2. There are disposed in the process block S2on a side of a carrier block S1, a plurality of vertically arranged transfer units TRS for transferring a substrate W between the same and transfer mechanisms for the respective parts, and a vertically movable transfer mechanism D1for the transfer unit for transferring a substrate between these transfer units. At least one of the coating film forming part and the developing part includes a substrate inspection unit43for inspecting a substrate transferred by the transfer mechanism for the corresponding part.
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Japanese Office Action issued Oct. 20, 2010, in Patent Application No. 2006-112704 (with English-language translation).
Hayashi Shin'ichi
Hayashida Yasushi
Matsuoka Nobuaki
Adams Bret
LaBalle Clayton E
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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