Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2007-08-28
2007-08-28
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With developing
C355S030000, C396S611000
Reexamination Certificate
active
11239386
ABSTRACT:
A coating and developing apparatus includes a process block which includes a unit block for coating-film formation which applies a resist, and a unit block for development which performs a developing process, and is separately provided with a coating-film-formation-unit-block transfer mechanism and a developing-process-unit-block transfer mechanism. After a substrate after exposure is transferred to a transfer stage from the interface-block transfer mechanism, the timing for the developing-process-unit-block transfer mechanism to receive the substrate is adjusted in such a way that the time from exposure of the substrate to transfer of the substrate to a heating unit becomes a preset time.
REFERENCES:
patent: 5943880 (1999-08-01), Tateyama
patent: 6261007 (2001-07-01), Takamori et al.
patent: 6264381 (2001-07-01), Ueda
patent: 6402400 (2002-06-01), Ueda et al.
patent: 6471422 (2002-10-01), Ueda et al.
patent: 6515731 (2003-02-01), Akimoto
patent: 6981808 (2006-01-01), Miyata et al.
patent: 2001-077014 (2001-03-01), None
patent: 2001-176792 (2001-06-01), None
patent: 20049193597 (2004-07-01), None
Hara Yoshitaka
Hayashida Yasushi
Nguyen Henry Hung
Smith , Gambrell & Russell, LLP
LandOfFree
Coating and developing apparatus and coating and developing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coating and developing apparatus and coating and developing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating and developing apparatus and coating and developing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3870534