Coating a substrate surface with a permeation barrier

Details Coating a substrate surface with a permeation barrier Coating a substrate surface with a permeation barrier

1992-11-30

1995-07-25

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427529, 427530, 427566, 427567, B05D 306

Patent

active

054360358

ABSTRACT:
A substrate surface is coated with a permeation barrier of inorganic material, which is vaporized from a crucible in a vacuum chamber evacuated to at least 10.sup.-3 mbar and precipitated on the substrate surface.
An ionizing electron beam of low energy is thus passed through the gas phase of inorganic material with formation of a plasma, preferably in the direction running approximately parallel to the substrate surface.
At least one low voltage electron beam gun with assigned electrode is incorporated in the vacuum chamber between the crucible and the substrate support.
The main application is for coating plastic films for the packaging industry.

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