Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent
1992-12-07
1994-03-29
Beck, Shrive
Coating processes
With post-treatment of coating or coating material
Heating or drying
427 96, 427420, 427314, B05D 302, B05D 512
Patent
active
052982882
ABSTRACT:
A porous substrate curtain coated with a single coating of a liquid dielectric that is cured into a well adhering film at least 15 microns thick with a uniformity of less than 5 microns. The substrate is cleaned to remove contaminants, heated to remove moisture, curtain coated with a single coating of a viscous heat curable liquid dielectric such as polyimide, and heated to cure the dielectric by increasing the temperature at most 15.degree. C. per minute to a predetermined cure temperature not exceeding 450.degree. C. The invention is well suited for fabricating a dielectric layer in a high density multichip module.
REFERENCES:
patent: Re30789 (1981-11-01), Pilgrim et al.
patent: 3632403 (1972-01-01), Greller
patent: 4060649 (1977-11-01), Coleman
patent: 4143187 (1979-03-01), Pilgrim et al.
patent: 4238528 (1980-12-01), Angelo et al.
patent: 4338349 (1982-07-01), Franklin et al.
patent: 4339507 (1982-07-01), Kurtz et al.
patent: 4340640 (1982-07-01), Weiner
patent: 4395527 (1983-07-01), Berger
patent: 4522880 (1985-06-01), Klostermeier et al.
patent: 4528833 (1985-07-01), Inaike et al.
patent: 4576857 (1986-03-01), Gannett et al.
patent: 4643910 (1987-02-01), Foutz
patent: 4664945 (1987-05-01), Maeda et al.
patent: 4696885 (1987-09-01), Vijan
patent: 4699803 (1987-10-01), Araps
patent: 4716058 (1987-12-01), Morin
patent: 4728531 (1988-03-01), Matz et al.
patent: 4752555 (1988-06-01), Takada et al.
patent: 4776997 (1988-10-01), Chino et al.
patent: 4794021 (1988-12-01), Potter
"Extrusion Coating Technology Executive Overview" by FAS Technologies, Inc., Dallas, Tex., p. 15 (Apr. 27, 1990).
"FAS-Coat Liquid Extrusion Coating System Precision Layers of High Purity Process Fluids" by FAS Technologies, Inc., Dallas, Tex., pp. 1-2 (1990) no month available.
L. M. Baker et al., "Polyimides for Dielectric Layers," (Publication unknown), AT&T Research Center, P.O. Box 900, Princeton, N.J., 08540 (no date available).
G. Smolinsky et. al., "Spin-On Dielectrics: Good News and Bad News!", Materials Research Symposium Proceedings, vol. 154, pp. 173-182 (1989) no month available.
"Polymers for Electronic Applications," edited by J. H. Lai, CRC Press, Boca Raton, Fla., pp. 33-60 (1989) no month available.
"Pyralin (.TM.) LX--Polyimide Coatings Processing Guidelines" by Du Pont Company, Semiconductor Materials, Barley Mill Plaza, Reynolds Mill Building, Wilmington, Del. 19989, H-12294 (May 1989).
"Pyralin (.TM.) LX Polyimide Coatings--Technical Data Sheet for PI-2610D and PI-2622D" by Du Pont Company, Semiconductor Materials, Barley Mill Plaza, Reynolds Mill Building, Wilmington, Del. 19898, H-12295 (Apr., 1989).
"Hitachi Chemical Data Sheet For PIX-L110" by Hitachi Chemical Company America, Ltd. (Nov., 1990).
D. Pietila et al., "Effects of Processing Conditions on the Material Properties of Polyimide Thin Films," presented at Fall, 1990 Materials Research Symposium conference, no month available.
M. J. Berry et al., "Benzocyclobutene As A Dielectric For Multichip Module Fabrication," IEEE Electronic Components Conference, 1990, pp. 746-750, no month available.
Gretchen et al., "Effects of Polymer/Metal Interaction in Thin Film Multichip Module Applications", IEEE Electronic Components Conference, 1990, pp. 717-726, no month available.
Numata et al., "Low Thermal Expansion Polyimides and Their Applications," Materials Research Symposium Proceedings, vol. 106, 1988, pp. 113-124, no month available.
"Pyralin (.TM.) Polyimide Coatings--Processing Guidelines for PI-2555 as Interlayer Dielectric" by Du Pont Company, Electronics Department, Wilmington, Del., H-24267, Feb. 1990, pp. 1-2.
"Pyralin (.TM.) Polyimide Coatings--Semiconductor Grade Products" by Du Pont Company, Electronics Department, Wilmington, Del., H24264, Feb. 1990, pp. 1-4.
"Ultradel (.TM.) Update, Polyimide Coating, Process Guidelines, Ultradel 4208 and E428" by Amoco Chemical Company, HJN, Jan. 1992, pp. 1-2.
"Ultradel (.TM.) Update, Polyimide Coating, Process Guidelines, Ultradel 4208" by Amoco Chemical Company, Mar. 1992, pp. 1-2.
Curry, II John W.
Pietila Douglas A.
Beck Shrive
Dudash Diana
Microelectronics and Computer Technology Corporation
Sigmond David M.
LandOfFree
Coating a heat curable liquid dielectric on a substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coating a heat curable liquid dielectric on a substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coating a heat curable liquid dielectric on a substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-790140