Coater track dispense arm

Details Coater track dispense arm Coater track dispense arm

1996-10-28

1998-10-13

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Mobile distributor

Track or guideway

239753, B05B 318

Patent

active

058200380

ABSTRACT:
An apparatus for dispensing a photoresist solution onto a semiconductor wafer. The apparatus may include a base that attaches a dispense arm to a track. A receiver may be connected to a distal end of the arm and a nozzle may extend through an aperture in the receiver. The arm may move along the track while dispensing photoresist solution through the nozzle onto a wafer. The arm may include a pivotal connector to allow a distal end of the arm to be raised to facilitate cleaning of the apparatus.

REFERENCES:
patent: 2857921 (1958-10-01), Hurst
patent: 5029755 (1991-07-01), Schmidt et al.
patent: 5065942 (1991-11-01), Shannon
patent: 5348234 (1994-09-01), v. d. Woude

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