Coater

Details Coater Coater

1997-09-17

1998-10-13

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118320, 118708, 118712, C23C 1600

Patent

active

058206779

ABSTRACT:
A spinning type coater for forming a thin film on a substrate by dropping a liquid onto the substrate is disclosed. An annular light-sensitive element is mounted on a peripheral portion of a rotatable table which is to be loaded with a substrate. A block carrying a nozzle or nozzles therewith is movable over the table in X and Y directions. A light emitting element for emitting light having a long wavelength is mounted on the block.

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