Coated substrates and methods for their preparation

Stock material or miscellaneous articles – Composite – Of silicon containing

Reexamination Certificate

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C428S448000, C428S698000, C428S221000, C428S218000, C427S574000

Reexamination Certificate

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07622193

ABSTRACT:
Coated substrates containing a barrier layer comprising hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3and methods of preparing the coated substrates.

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Hean Ju Lee et al. The mechanical properties of the SiOC(-H) composite thin films with a low dielectric constant. Surface and Coatings Technology. 171 (2003) 296-301.

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