Coated spherical silicon nanoparticle thin film UV detector...

Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means

Reexamination Certificate

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C438S063000, C257S431000

Reexamination Certificate

active

06992298

ABSTRACT:
A UV detector has a UV detection thin film of coated spherical silicon nanoparticles formed upon a substrate. The detector includes structures to bias the thin film. In preferred embodiments, a thin conductor that is at least semi-transparent to UV radiation is formed over the thin film. In preferred embodiments, the UV detector is formed as a silicon based integration, upon a device quality silicon wafer.

REFERENCES:
patent: 3597624 (1971-08-01), Weiner
patent: 3786321 (1974-01-01), Mathews
patent: 4931692 (1990-06-01), Takagi et al.
patent: 5308804 (1994-05-01), Lee
patent: 5336547 (1994-08-01), Kawakita et al.
patent: 5527386 (1996-06-01), Statz
patent: 5537000 (1996-07-01), Alivisatos et al.
patent: 5561679 (1996-10-01), Mannik et al.
patent: 5690807 (1997-11-01), Clark, Jr. et al.
patent: 5695617 (1997-12-01), Graiver et al.
patent: 5703896 (1997-12-01), Pankove et al.
patent: 5714766 (1998-02-01), Chen et al.
patent: 5747180 (1998-05-01), Miller et al.
patent: 5770022 (1998-06-01), Chang et al.
patent: 5881200 (1999-03-01), Burt
patent: 5891548 (1999-04-01), Graiver et al.
patent: 5906670 (1999-05-01), Dobson et al.
patent: 5932889 (1999-08-01), Matsumura et al.
patent: 5939206 (1999-08-01), Kneezel et al.
patent: 5942748 (1999-08-01), Russell et al.
patent: 6060743 (2000-05-01), Sugiyama et al.
patent: 6239453 (2001-05-01), Yamada et al.
patent: 6326311 (2001-12-01), Ueda et al.
patent: 6407424 (2002-06-01), Forbes
patent: 6479825 (2002-11-01), Weiss
patent: 2002/0074565 (2002-06-01), Flagan et al.
patent: 0 354 141 (1990-02-01), None
patent: 05129648 (1993-05-01), None
G. Allan, C. Delerue, M. Lannoo, “Nature of Luminescent Surface States of Semiconductor Nanocrystallites”, Physical Rev. Lett., vol. 76, No. 16, Apr. 15, 1996, pp. 2961-2964.
D. Andsager, J. Hilliard, J.M. Hetrick, L.H. AbuHassan, M. Plisch, M.H. Nayfeh, “Quenching of Porous Silicon Photoluminescence by Deposition of Metal Adsorbates”, J. Appl. Phys., vol. 74, No. 7, Oct. 1, 1993, pp. 4783-4785.
D. Andsager, J. Hilliard, M.H. Nayfeh, “Behavior of Porous Silicon Emission Spectra During Quenching by Immersion in Metal Ion Solutions”, Appl. Phys. Lett., vol. 64, No. 9, Feb. 28, 1994, pp. 1141-1143.
D. Andsager, J.M. Hetrick, J. Hilliard, M.H. Nayfeh, “Diffusion of Copper in Porous Silicon”, J. Appl. Phys., vol. 77, No. 9, May 1, 1995, pp. 1-4.
Anton Fojtik, Amim Henglein, “Luminescent colloidal silicon particles”, Chemical Physics Letters 221, Apr. 29, 1994, pp. 363-367.
Gennadiy Belomoin, Joel Therrien, and Munir Nayfeh, “Oxide and hydrogen capped ultrasmall blue luminescent Si nanoparticles”, Applied Physics Letters, vol. 77, No. 6, Aug. 7, 2000, pp. 779-780.
M.L. Brongersma, K.S. Min, E. Boer, T.Tambo, A. Polman, and H.A. Atwater, “Tailoring the Optical Properties of Si Nanocrystals in SiO2Materials Issues and Nanocrystal Laser Perspectives”, Mat. Res. Soc. Symp. Proc., vol. 486, 1998 Materials Research Society, pp. 213-217.
L.E. Brus, P.F. Szajowski, W.L. Wilson, T.D. Harris, S. Schuppler, and P.H. Citrin, “Electronic Spectroscopy and Photophysics of Si Nanocrystals: Relationship to Bulk c-Si and Porous Si”, J. Am. Chem. Soc., 1995, vol. 117, pp. 2915-2922.
L.T. Canham, “Silicon Quantum Wire Array Fabrication by Electrochemical and Chemical Dissolution of Wafers”, Appl. Phys. Lett., vol. 57, No. 10, Sep. 3, 1990, pp. 1046-1048.
R.P. Chin, Y.R. Shen, V. Petrova-Koch, “Photoluminescence from Porous Silicon by Infrared Multiphoton Excitation” Science, vol. 270, Nov. 3, 1995, pp. 776-778.
S. Li, S.J. Silvers, M.S. El Shall, Luminescence Properties of Silicon Nanocrystals, Advances in Microcrystalline and Nanocrystalline Semiconductor Symposium, Boston, MA, USA, Dec. 2-6, 1996 (abstract).
G.M. Credo, M.D. Mason, and S.K. Buratto, “External quantum efficiency of single porous silicon nanoparticles”, Applied Physics Letters, vol. 74, No. 14, Apr. 5, 1999, pp. 1978-1980.
A.G. Cullis, L.T. Canham, P.D.J. Calcott, “The Structural and Luminescence Properties of Porous Silicon”, J. Appl. Phys., vol. 82, No. 3, Aug. 1, 1997, pp. 909-965.
D.J. DiMaria, J.R. Kirtley, E.J. Pakulis, D.W. Dong, T.S. Kuan, F.L. Pesavento, T.N. Theis, J.A. Cutro, and S.D. Brorson, “Electroluminescence studies in silicon dioxide films containing tiny silicon islands”, J. Appl. Phys., vol. 56, No. 2, Jul. 15, 1984, pp. 401-416.
J. Erland, P. Yu, S.I. Bozhevolnyl, J.M. Hvam, N.N. Ledentsov, “Second harmonic spectroscopy of semiconductor nanostructures”, Quantum Electronics and Laser Science Conference Technical Digest, May 1999, pp. 233-234.
F. Koch, “Models and Mechanisms for the Luminescence of Porous Si”, Mater. Res. Soc. Symp. Proc., vol. 298, 1993, pp. 319-329.
J. Gole, D. Dixon, “Evidence for Oxide Formation from the Single and Multiphoton Excitation of a Porous Silicon Surface or Silicon ‘Nanoparticles’”, J. Appl. Phys., vol. 83, No. 11, Jun. 1, 1998, pp. 5985-5991.
E. Hanamura, “Very Large Optical Nonlinearity of Semiconductor Microcrystallites”, Physical Rev. B, vol. 37, No. 3, Jan. 15, 1988, pp. 1273-1279.
J.L. Heinrich, C.L. Curtis, G.M. Credo, K.L. Kavanagh, M.J. Sailor, “Luminescent Colloidal Silicon Suspensions from Porous Silicon”, Science, vol. 255, Jan. 3, 1992, pp. 66-68.
J. Hilliard, D. Andsager, L. Abu Hassan, H.M. Nayfeh, M.H. Nayfeh, “Infrared Spectroscopy and Secondary Ion Mass Spectrometry of Luminescent, Nonluminescent and Metal Quenched Porous Silicon”, J. Appl. Phys., vol. 76, No. 4, Aug. 15, 1994, pp. 2423-2427.
J.E. Hilliard, H.M. Nayfeh, M.H. Nayfeh, “Re-Establishment of Photoluminescence in Cu Quenched Porous Silicon by Acid Treatment”, J. App. Phys., vol. 77, No. 8, Apr. 15, 1995, pp. 4130-4132.
Kouichi Murakami and Tetsuya Makimura, Silicon nanoparticles with visible light emission -Laser ablation-, Oyo Buturi, vol. 67, No. 7, pp. 817-821, Jul. 1998 (with verified translation).
K.A. Littau, P.J. Szajowski, A.J. Muller, A.R. Kortan, and L.E. Brus, “A Luminescent Silicon Nanocrystal Colloid via a High-Temperature Aerosol Reaction”, The Journal of Physical Chemistry, vol. 97, No. 6, 1993, pp. 1224-1230.
L.A. Chiu, A.A. Seraphin, and K.D. Kolenbrander, “Gas Phase Synthesis and Processing of Silicon Nanocrystallites: Characterization by Photoluminescence Emission Spectroscopy”, Journal of Electronic Materials, vol. 23, No. 3, 1994, pp. 347-354.
Tetsuya Makimura, Yasuhiko Kunii and Kouichi Murakami, “Light Emission from Nanometer-Sized Silicon Particles Fabricated by the Laser Ablation Method”, Jpn. J. Appl. Phys., vol. 35, (1996), pp. 4780-4784.
M. Nayfeh, “Fabrication of Nanometer Scale Structures”, SPIE Institutes, vol. IS 10, (1993), pp. 200-217.
M.H. Nayfeh, N. Rigakis, Z. Yamani, “Photoexcitation of Si-Si Surface States in Nanocrystallites”, Physical Review B, vol. 56, No. 4, Jul. 15, 1997, pp. 2079-2084.
M.H. Nayfeh, N. Rigakis, Z. Yamani, “Photoexcitation of Si-Si Radiative Surface States in Nanocrystallites”, Mat. Res. Soc. Symp. Proc., vol. 486, 1998, pp. 243-248.
M.H. Nayfeh, Z. Yamani, O. Gurdal, A. Alaql, “Nanostructure of Porous Silicon Using Transmission Microscopy”, Mat. Res. Soc. Symp. Proc., vol. 536, 1999.
M. Nayfeh, O. Akcakir, J. Therrien, Z. Yamani, N. Barry, W. Yu, and E. Gratton, “Highly nonlinear photoluminescence threshold in porous silicon”, Applied Physics Letters, vol. 75, No. 26, Dec. 27, 1999, pp. 4112-4113.
U. Neuwald, A. Feltz, U. Memmert, R.J. Behm, “Chemical Oxidation of Hydrogen Passivated Si(111) Surface in H2O2”, J. Appl. Phys., vol. 78, No. 6, Sep. 15, 1995, pp. 4131-4136.
A. Pasquarello, M.S. Hybertsen, R. Car, “Si 2p Core-Level Shifts at the Si(001)—SiO2Interface: A First-Principles Study”, Phys. Rev. Lett., vol. 74, No. 6, Feb. 6, 1995, pp.

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