Coated quartz glass component

Details Coated quartz glass component Coated quartz glass component

1995-07-25

1996-10-08

Bueker, Richard

Coating apparatus

Gas or vapor deposition

118728, 118500, 156345, 29 2501, 211 41, 206454, C03C 1722, C23C 1630

Patent

active

055627749

ABSTRACT:
Quartz glass component having a coating with a silicon carbide surface includes a gradient layer of silicon carbide and at least one additional constituent which is less hard and has a lower modulus of elasticity than silicon carbide and whose concentration decreases across the thickness of the layer from inside to outside. The coated component has good thermal-shock resistance and long-term stability in terms of its chemical resistance to hydrofluoric acid and nitric acid as well as to a mixture of these two acids.

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