Coated optics to improve durability

Details Coated optics to improve durability Coated optics to improve durability

2005-03-29

2005-03-29

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S689000, C428S699000, C428S700000, C428S336000

Reexamination Certificate

active

06872479

ABSTRACT:
The invention is directed to a coated metal fluoride crystals that are resistant to laser-induced damage by a below 250 nm UV laser beam; methods of making such coated crystals, and the use of such coated crystals. The method includes the steps of providing an uncoated metal fluoride crystal of general formula MF2, where M is beryllium, magnesium, calcium, strontium and barium, and mixtures thereof, and coating the uncoated metal fluoride crystal with a coating of a selected material to thereby form a coated metal material resistant to laser induced damage. Preferred coating materials include MgF2, MgF2doped fused silica and fluorine doped fused silica.

REFERENCES:
patent: 4101707 (1978-07-01), Henry
patent: 5403673 (1995-04-01), Haga et al.
patent: 6466365 (2002-10-01), Maier et al.
patent: 20010008540 (2001-07-01), Oba et al.
“Characteristics of deep UV Optics at 193nm & 157nm” G.P. Callahan, et al, Society of Photo-Optical Engineers, 1998.
“Plasma Technology” Kirk-Othmed Encyclopedia of Chemical Technology, 4thEd vol. 19, pps. 226-257.
“Thin Films” Kirk-Othmed Encyclopedia of Chemical Technology, 4thEd vol. 23, pps. 1040-1076.

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