Coated doped oxides

Details Coated doped oxides Coated doped oxides

2005-02-15

2005-02-15

Niebling, John F. (Department: 2812)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

Reexamination Certificate

active

06855635

ABSTRACT:
Oxide particles with a doping component distributed in the core and a shell surrounding the core, which can be prepared by first introducing the doping into the core of a metal oxide or metalloid oxide via an aerosol in a pyrogenic process, subsequently coating the doped core with a salt solution of a metal or metalloid, drying it and optionally calcining it; which particles can be employed for chemical-mechanical polishing.

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