Coat/develop module with shared dispense

Details Coat/develop module with shared dispense Coat/develop module with shared dispense

2008-07-08

2008-07-08

Edwards, Laura (Department: 1792)

Coating apparatus

Projection or spray type

Moving projector

C118S052000, C118S319000, C118S320000, C118S500000

Reexamination Certificate

active

11111353

ABSTRACT:
An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.

REFERENCES:
patent: 5250114 (1993-10-01), Konishi et al.
patent: 5960225 (1999-09-01), Fujimoto
patent: 6257827 (2001-07-01), Hendrickson et al.
patent: 6258167 (2001-07-01), Kawano et al.
patent: 6616762 (2003-09-01), Inada et al.
patent: 6736556 (2004-05-01), Kanagawa
patent: 7255747 (2007-08-01), Ishikawa et al.
patent: 2006/0130474 (2006-06-01), Ishikawa et al.
patent: 05003151 (1993-01-01), None
patent: 2004013965 (2004-02-01), None

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