Coating apparatus – Projection or spray type – Moving projector
Reexamination Certificate
2008-07-08
2008-07-08
Edwards, Laura (Department: 1792)
Coating apparatus
Projection or spray type
Moving projector
C118S052000, C118S319000, C118S320000, C118S500000
Reexamination Certificate
active
07396412
ABSTRACT:
An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.
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Ishikawa Tetsuya
Roberts Rick
Edwards Laura
Sokudo Co., Ltd.
Townsend and Townsend / and Crew LLP
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