Optics: image projectors – Projected image combined with real object
Patent
1974-09-26
1976-05-18
Bell, Jr., Houston S.
Optics: image projectors
Projected image combined with real object
353 99, 350 27, 350294, G03B 2128
Patent
active
039573648
ABSTRACT:
A viewing system for an annular projection system, particularly useful to provide a view of a semiconductor wafer on which an image of a integrated circuit mask pattern has been projected using an annular field projection system in which the field of view can be as large as the large dimension of that portion of the annular region subtended by the wafer thereby permitting ideal coarse alignment of the mask and wafer. The system further includes means to illuminate the mask and wafer separately and in different colors to thereby simplify the distinction of one from the other in the combined image thus facilitating the alignment task.
REFERENCES:
patent: 2482115 (1949-09-01), Laird
patent: 3598468 (1971-08-01), Perry
patent: 3667827 (1972-06-01), Lawrence
R-RCA Technical Notes, Antenna with Semi-Transparent Reflector, P. Foldes, RCA TN No: 539, 3/62.
Buckley Jere D.
Casas Raul E.
Markle David A.
Bell, Jr. Houston S.
Conant J. K.
Giarratana S. A.
Masselle F. L.
Mirabito A. J.
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