Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1986-10-07
1988-02-02
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
269 21, H01L 4108
Patent
active
047230860
ABSTRACT:
The positioning system, particularly useful for moving a stage mounting a semiconductor wafer for the manufacture of semiconductor devices, provides a lead screw and zero backlash nut for coarse motion of the stage. A thrust member fixedly mounts the nut and the member is flexurally mounted to a housing supporting the stage acting through a piezoelectric motor connection. This action brings the stage in a coarse adjustment mode into the capture range of the piezoelectric motor for fine adjustment by in and out movement of a pusher rod extending from the motor. Flexures allow motion of the thrust member parallel to the lead screw and protects the piezoelectric motor from undesirable side loads. A separate duplicate mechanism is used for each of x-axis and y-axis movements of the housing and stage to bring the stage to a precise position by the respective coarse and fine translationary movements of the lead screw, thrust members and piezoelectric motors.
REFERENCES:
patent: 2325238 (1943-07-01), Flint
patent: 2363409 (1944-11-01), Gibson
patent: 3524196 (1970-08-01), Church et al.
patent: 3569718 (1971-03-01), Borner
patent: 3611577 (1971-10-01), Smith
patent: 4195243 (1980-03-01), Thaxter
patent: 4583135 (1986-04-01), Kimura
patent: 4607166 (1986-08-01), Tamaki
Leibovich Vladimir E.
Novak W. Thomas
Budd Mark O.
MacDonald Thomas S.
MacPherson Alan H.
Micronix Corporation
Winters Paul J.
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