Abrading – Machine – Scouring device
Reexamination Certificate
2006-11-07
2006-11-07
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Machine
Scouring device
C451S285000, C451S527000, C451S530000
Reexamination Certificate
active
07131895
ABSTRACT:
A polishing pad (104) having an annular polishing track (122) and including a plurality of grooves (148) that each traverse the polishing track. Each groove includes a plurality of flow control segments (CS1–CS3) and at least two discontinuities in slope (D1, D2) located within the polishing track.
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Elmufdi Carolina L.
Hendron Jeffrey J.
Muldowney Gregory P.
Ackun Jr. Jacob K.
Biederman Blake T.
Rohm and Haas Electronic Materials CMP Holdings Inc.
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