CMP pad dresser with oriented particles and associated methods

Details CMP pad dresser with oriented particles and associated methods CMP pad dresser with oriented particles and associated methods

2005-09-28

2009-02-17

Eley, Timothy V (Department: 3724)

Abrading

Abrading process

With tool treating or forming

C451S072000, C451S443000

Reexamination Certificate

active

07491116

ABSTRACT:
CMP pad dressers with superabrasive particles oriented into an attitude that controls CMP pad performance, and methods associated therewith are disclosed and described. The controlled CMP pad performance may be selected to optimize CMP pad dressing rate and dresser wear.

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