CMP pad conditioner

Details CMP pad conditioner CMP pad conditioner

2007-03-07

2009-06-02

Rachuba, Maurina (Department: 3727)

Abrading

Accessory

Dressing

Reexamination Certificate

active

07540802

ABSTRACT:
A CMP pad conditioner is provided with a grinding part formed by fixing abrasive grains on a metal base by soldering, wherein the grinding part has a flat part near an inner periphery and an inclined part near an outer periphery, wherein abrasive grains having regular shapes are fixed to the flat part, and wherein abrasive grains having acute shapes are fixed to the inclined part.

REFERENCES:
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6213856 (2001-04-01), Cho et al.
patent: 6325709 (2001-12-01), Nanda et al.
patent: 6884155 (2005-04-01), Sung et al.
patent: 2003/0084894 (2003-05-01), Sung
patent: 2005/0215188 (2005-09-01), Toge et al.
patent: A 2001-113456 (2001-04-01), None
patent: A 2003-305644 (2003-10-01), None
patent: A 2005-161440 (2005-06-01), None

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