CMP for corrosion-free CoFe elements for magnetic heads

Details CMP for corrosion-free CoFe elements for magnetic heads CMP for corrosion-free CoFe elements for magnetic heads

2006-12-05

2006-12-05

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Forming or treating article containing magnetically...

Reexamination Certificate

active

07144518

ABSTRACT:
A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of Al2O3, adjusting the concentration of H2O2in said slurry to within a range of 6–12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55–90 rpm, and adjusting polishing pressure to within a range of 5–7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.

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